Patent Number: 7,914,246

Title: Actuatable loadport system

Abstract: A system adapted to exchange wafer carriers between an overhead transport mechanism and a platform is provided. The system employs a wafer carrier having at least one handle extending therefrom, an overhead transfer mechanism, a transporter coupled to the overhead transfer mechanism and adapted to move therealong and having a wafer carrier coupling mechanism adapted to couple to the at least one wafer carrier handle, a platform positioned below the overhead transfer mechanism such that wafer carriers traveling along the overhead transfer mechanism travel over the platform, and an actuator coupled to the platform and adapted so as to elevate the platform to an elevation wherein the loading platform may contact the bottom of a wafer carrier coupled to the overhead transfer mechanism.

Inventors: Bachrach; Robert Z. (Burlingame, CA)

Assignee: Applied Materials, Inc.

International Classification: B65G 47/90 (20060101)

Expiration Date: 2019-03-29 0:00:00