Patent Number: 7,973,105

Title: Polymer particles having improved mechanical properties and applications of same

Abstract: Polymer particles of improved mechanical hardness are provided, the polymer particles being subjected to a thermal cycle of heating and subsequently cooling. The polymer particles comprise combinations of preferably three monomers, the monomers having hydrophilic and hydrophobic groups in their polymer chain in order to achieve preferential orientation of the polymer chains in a polar solvent after applying the heating cycles of the invention (for example, but not limited to, polymethylmethacrylate and polystyrene based terpolymers and copolymers). Polymeric abrasives used in slurry compositions for polishing copper and their use in a chemical mechanical polishing method are also provided.

Inventors: Armini; Silvia (Terni, IT)

Assignee: IMEC

International Classification: C08K 3/34 (20060101)

Expiration Date: 2019-07-05 0:00:00