Patent Number: 8,089,038

Title: Reticle image generation using polarizers and metamaterial filters

Abstract: Methods and apparatus relating to generating reticle inspection images are described. In an embodiment, a reticle inspection image is generated by filtering incident light through a metamaterial filter. Other embodiments are also described.

Inventors: Latypov; Azat M. (San Jose, CA)

Assignee: KLA-Tencor Corporation

International Classification: H01J 3/14 (20060101); G02F 1/01 (20060101)

Expiration Date: 2020-01-03 0:00:00