Patent Number: 8,089,636

Title: Inspecting system and inspecting method

Abstract: An object of the present invention is to apply a phase shift method to a workpiece having a rough surface to accurately detect an abnormal concave-convex irregularity. Therefore, in an inspecting system of the present invention, an image of a stripe pattern reflected on an inspection target surface is detected at a shallow angle, and one or more continuous unit stripes of a unit stripes reflected image is specified among the stripe pattern reflected images existing in a predetermined distance range counted from the edge in a closer side to the workpiece. Then, the phase of the specified unit stripes reflected image is varied to apply a phase shift method and scan the inspection target surface with the unit stripes reflected image to thereby detect the abnormal concave-convex irregularity.

Inventors: Miyake; Atsushi (Nishinomiya, JP)

Assignee: KDE Corporation

International Classification: G01B 11/24 (20060101)

Expiration Date: 2020-01-03 0:00:00