Patent Number: 8,303,779

Title: Methods for forming a transparent conductive oxide layer on a substrate

Abstract: Methods of depositing a transparent conductive oxide layer on a substrate are generally disclosed. A shield of greater than about 75% by weight molybdenum can be attached to a first surface of a substrate such that the shield contacts at least about 75% of the first surface. The shield can then be heated via an energy source to cause thermal exchange from the shield to the substrate to heat the substrate to a sputtering temperature. A transparent conductive oxide layer can then be sputtered on a second surface of the substrate at the sputtering temperature. Methods are also generally disclosed for manufacturing a cadmium telluride based thin film photovoltaic device.

Inventors: Drayton; Jennifer A. (Golden, CO)

Assignee: PrimeStar Solar, Inc.

International Classification: C23C 14/00 (20060101); C23C 14/32 (20060101)

Expiration Date: 2021-11-06 0:00:00