Patent Number: 8,492,183

Title: Manufacturing method of film pattern of micro-structure and manufacturing method of TFT-LCD array substrate

Abstract: A method of forming a film pattern with micro-pattern and a method of manufacturing a thin film transistor liquid crystal display (TFT-LCD) array substrate are provided. The method of manufacturing the film pattern with micro-pattern comprises: depositing a thin film on a substrate; jetting or dropping etchant on the thin film with a predetermined etching pattern by an inkjet print device; etching the thin film by the etchant; and cleaning the thin film to form a film pattern on the substrate.

Inventors: Long; Chunping (Beijing, CN), Gao; Haoran (Beijing, CN), Xu; Jigang (Beijing, CN)

Assignee: Boe Technology Co., Ltd.

International Classification: H01L 21/00 (20060101)

Expiration Date: 2021-07-23 0:00:00