Patent Number: 8,511,251

Title: Film deposition device and method thereof

Abstract: A film deposition device includes a nozzle configured to inject a plurality of particles to a target; and a suction unit provided around the nozzle and configured to suck particles that are rebounded from the target among the plurality of particles injected from the nozzle.

Inventors: Sato; Shintaro (Kawasaki, JP)

Assignee: Fujitsu Limited

International Classification: B05C 5/02 (20060101)

Expiration Date: 2021-08-20 0:00:00