Patent Number: 8,574,412

Title: Magnet mounting system and magnetron sputtering device having same

Abstract: A magnetron sputtering device includes a main body and a magnet mounting system for receiving magnets. The magnet mounting system comprises a first annular member, a second annular member coaxially encasing the first member, a third annular member coaxially encasing the second member, a first driving device connected to the first annular member, a second driving device connected to the second annular member, and a third driving device connected to the third annular member. The first driving device, the second driving device, and the third driving device are respectively configured for driving the first annular member, the second annular member, and the third annular member to move along an axis of the first annular member.

Inventors: Pei; Shao-Kai (Taipei Hsien, TW)

Assignee: Hon Hai Precision Industry Co., Ltd.

International Classification: C23C 14/35 (20060101)

Expiration Date: 1/05/12017