Patent Number: 8,574,942

Title: Method of forming silicon nanowires and method of fabricating lithium secondary battery using the same

Abstract: A method of preparing a silicon nanowire and a method of fabricating a lithium secondary battery including the silicon nanowire are provided. The method of preparing a silicon nanowire may include forming a catalyst layer including metal particles separated from one another on a silicon layer, selectively etching the silicon layer contacting the metal particles, and removing the metal particles.

Inventors: Park; Soojin (Ulsan, KR), Bang; Byoungman (Gyeongsan-si, KR), Lee; Jung-Pil (Daejeon, KR), Song; Hyun-Kon (Ulsan, KR), Cho; Jaephil (Ulsan, KR)

Assignee: Unist Academy-Industry Research Corporation

International Classification: H01L 21/00 (20060101)

Expiration Date: 1/05/12017