Patent Number: 8,575,022

Title: Top corner rounding of damascene wire for insulator crack suppression

Abstract: A structure and method for fabricating the structure that provides a metal wire having a first height at an upper surface. An insulating material surrounding said metal wire is etched to a second height below said first height of said upper surface. The metal wire from said upper surface, after etching said insulating material, is planarized to remove sufficient material from a lateral edge portion of said metal wire such that a height of said lateral edge portion is equivalent to said second height of said insulating material surrounding said metal wire.

Inventors: Chrisman; Gregory S. (Essex Junction, VT), Cooney, III; Edward C. (Jericho, VT), Gambino; Jeffrey P. (Westford, VT), He; Zhong-Xiang (Essex Junction, VT), McDevitt; Thomas L. (Underhill, VT), Shah; Eva A. (Essex Junction, VT)

Assignee: International Business Machines Corporation

International Classification: H01L 21/4763 (20060101); H01L 21/44 (20060101)

Expiration Date: 1/05/12017