Patent Number: 8,575,718

Title: Programmable electrical fuse

Abstract: The present invention relates to e-fuse devices, and more particularly to a device and method of forming an e-fuse device, the method comprising providing a first conductive layer connected to a second conductive layer, the first and second conductive layers separated by a barrier layer having a first diffusivity different than a second diffusivity of the first conductive layer. A void is created in the first conductive layer by driving an electrical current through the e-fuse device.

Inventors: Abou-Khalil; Michael J. (Essex Junction, VT), Gauthier, Jr.; Robert J. (Hinesburg, VT), Lee; Tom C. (Essex Junction, VT), Li; Junjun (Williston, VT), Mitra; Souvick (Burlington, VT), Putnam; Christopher S. (Hinesburg, VT), Tonti; William (Essex Junction, VT)

Assignee: International Business Machines Corporation

International Classification: H01L 23/52 (20060101); H01L 21/82 (20060101)

Expiration Date: 1/05/12017