Patent Number: 8,575,791

Title: Manufacturing-process equipment

Abstract: A manufacturing-process equipment has a platform assembly, a measurement feedback assembly and a laser-working assembly. The platform assembly has a base and a hybrid-moving platform. The base has a mounting frame. The hybrid-moving platform is mounted on the base and has a long-stroke moving stage and a piezo-driven micro-stage. The long-stroke moving stage has a benchmark set and a driving device. The piezo-driven micro-stage is connected to the long-stroke moving stage and has a working platform. The measurement feedback assembly is securely mounted on the platform assembly and has a laser interferometer, a reflecting device and a signal-receiving device. The laser-working assembly is mounted on the platform assembly, is electrically connected to the measurement feedback assembly and has a laser direct-writing head, a controlling interface device and a positioning interface device.

Inventors: Jywe; Wen-Yuh (Huwei Chen, TW), Shen; Jing-Chung (Huwei Chen, TW), Yang; Chin-Tien (Huwei Chen, TW), Liu; Chien-Hung (Huwei Chen, TW), Ju; Jau-Jiu (Huwei Chen, TW), Wu; Chia-Hung (Huwei Chen, TW), Huang; Chun-Chieh (Huwei Chen, TW), Duan; Lili (Huwei Chen, TW), Lee; Yuan-Chin (Huwei Chen, TW)

Assignee: National Formosa University

International Classification: G01B 11/02 (20060101); H02K 41/02 (20060101)

Expiration Date: 1/05/12017