Patent Number: 8,575,819

Title: Microelectromechanical resonators with passive frequency tuning using built-in piezoelectric-based varactors

Abstract: Microelectromechanical resonators include a resonator body with a built-in piezoelectric-based varactor diode. This built-in varactor diode supports passive frequency tuning by enabling low-power manipulation of the stiffness of a piezoelectric layer, in response to controlling charge build-up therein at resonance. A resonator may include a composite stack of a bottom electrode, a piezoelectric layer on the bottom electrode and at least one top electrode on the piezoelectric layer. The piezoelectric layer includes a built-in varactor diode, which is defined by at least two regions having different concentrations of electrically active dopants therein.

Inventors: Bhugra; Harmeet (San Jose, CA), Samarao; Ashwin (San Jose, CA)

Assignee: Integrated Device Technology, inc.

International Classification: H01L 41/107 (20060101); H01L 41/09 (20060101); H03L 1/00 (20060101); H03L 7/00 (20060101); H03H 9/00 (20060101)

Expiration Date: 1/05/12017