Patent Number: 8,575,926

Title: Planar magnetic field probe

Abstract: A planar magnetic field probe is provided. The planar magnetic field probe increases the sensitivity of magnetic field intensity detection by using a left multi-sensor loop and a right multi-sensor loop formed by a first patterned metal layer and a second patterned metal layer, and decreases the electric field noise coupling by surrounding the left multi-sensor loop and the right multi-sensor loop with a symmetrical shielding metal structure formed by a first patterned shielding metal layer, a second patterned shielding metal layer and a plurality of through vias.

Inventors: Chao; Shih-Chieh (Taipei, TW), Huang; Chih-Wen (Taipei, TW)

Assignee: Tatung Company

International Classification: G01R 33/02 (20060101)

Expiration Date: 1/05/12017