Patent Number: 8,585,115

Title: Method and apparatus for lifting a horizontally-oriented substrate from a cassette

Abstract: A system and method are disclosed for removing horizontally oriented substrates from a cassette. A substrate lifter has an engagement end for engaging a substrate and an adjustment end for engaging an adjustment assembly. The engagement end includes a recess having first and second arcuate sidewalls configured to engage an OD of the substrate, and a circular protrusion positioned between the first and second arcuate sidewalls. The circular protrusion allows lateral movement of the substrate up to a predetermined amount and prevents lateral movement of the substrate in excess of the predetermined amount. Other embodiments are described and claimed.

Inventors: Fairhurst; John Robert (Plaistow, NH), Krampert; Jeffrey E. (Topsfield, MA), Hertel; Richard J. (Boxford, MA), Muka; Richard (Topsfield, MA)

Assignee: Varian Semiconductor Equipment Associates, Inc.

International Classification: B66F 19/00 (20060101)

Expiration Date: 1/19/12018