Patent Number: 8,586,142

Title: Method and apparatus for producing small structures

Abstract: The present invention relates to a method for producing small structures includes: depositing a mask on a surface of a substrate; and evaporating a source material under such evaporation condition performed at such pressure to form a layer onto both a shadowed surface area and a non-shadowed surface area of the mask and the substrate.

Inventors: Himmelhaus; Michael (Tokyo, JP), Worsfold; Oliver (Tokyo, JP), Whitehouse; Conor D. (Tokyo, JP)

Assignee: Fujirebio Inc.

International Classification: B05D 1/32 (20060101)

Expiration Date: 1/19/12018