Patent Number: 8,714,392

Title: Lid for use in ion beam assisted deposition

Abstract: A lid includes a first surface defining a cavity, a first joint defining an inlet, a second joint defining an outlet, a center hole communicating with the inlet, a circular channel communicating with the outlet and extending along a periphery of the first surface, and a number of branch channels radially extending from the center hole to the circular channel. The first surface includes a screen plate retained within the cavity, capable of letting the side-effect particles adhere thereon. Each of the plurality of branch channels communicates with the center hole and the circular channel, allowing liquid of a predetermined temperature to circulate within the lid.

Inventors: Pei; Shao-Kai (New Taipei, TW)

Assignee: Hon Hai Precision Industry Co., Ltd.

International Classification: B65D 51/00 (20060101); B65D 25/28 (20060101); B65D 6/40 (20060101)

Expiration Date: 5/06/12018