Patent Number: 8,715,460

Title: Apparatus and method for removing a CMP pad from a platen

Abstract: A method and apparatus for removing a pad adhesively secured to a platen. The apparatus includes a barrel assembly having a clamp assembly fixedly attached to a perimeter of the barrel assembly; a rotatable handle assembly nested within the barrel assembly; and a ratchet assembly nested between the handle assemble and the barrel assembly the ratchet assembly configured to engage the rotatable handle assembly.

Inventors: Bandy; John J. (Cambridge, VT), Bates; Graham M. (Waterbury, VT), Brigante; Jeffery A. (Colchester, VT)

Assignee: International Business Machines Corporation

International Classification: B32B 38/10 (20060101)

Expiration Date: 5/06/12018