Patent Number: 8,715,518

Title: Gas barrier with vent ring for protecting a surface region from liquid

Abstract: A protective chuck is disposed on a substrate with a gas bearing layer between the bottom surface of the protective chuck and the substrate surface. The gas bearing layer protects a surface region against a fluid layer covering the substrate surface. The protection of the gas bearing is a non-contact protection, reducing or eliminating potential damage to the substrate surface due to friction. The gas bearing can enable combinatorial processing of a substrate, providing multiple isolated processing regions on a single substrate with different material and processing conditions.

Inventors: Kelekar; Rajesh (Los Altos, CA)

Assignee: Intermolecular, Inc.

International Classification: H01L 21/302 (20060101); B08B 3/04 (20060101); C23F 1/02 (20060101)

Expiration Date: 5/06/12018