Patent Number: 8,715,575

Title: Lead-free piezoelectric ceramic films and a method for making thereof

Abstract: This invention relates to a method of making lead-free piezoelectric ceramic films. Specifically, the invention is directed to a method for fabricating lead-free piezoelectric free standing films having enhanced piezoelectric properties. The films may be used for a number of applications including incorporation in microelectronic devices such as energy harvesting devices and sensor technologies.

Inventors: Shih; Wei-Heng (Bryn Mawr, PA), Shih; Wan Y. (Bryn Mawr, PA), Li; Huidong (Richland, WA)

Assignee: Drexel University

International Classification: G01N 15/00 (20060101)

Expiration Date: 5/06/12018