Patent Number: 8,716,534

Title: Precursors to fluoroalkanol-containing olefin monomers, and associated methods of synthesis and use

Abstract: The invention provides alkene fluoroalkanol and fluorinated polyol precursors to fluoroalkanol-substituted .alpha.,.beta.-unsaturated esters. The fluoroalkanol-substituted .alpha.,.beta.-unsaturated esters are olefins that can be readily polymerized to provide fluoroalkanol-substituted polymers useful in lithographic photoresist compositions. Also provided are methods for synthesizing the alkene fluoroalkanol and fluorinated polyol precursors.

Inventors: Breyta; Gregory (San Jose, CA), DiPietro; Richard Anthony (Campbell, CA), Dawson; Daniel Joseph (San Jose, CA)

Assignee: International Business Machines Corporation

International Classification: C07C 35/22 (20060101); C07C 35/18 (20060101); C07C 35/06 (20060101); C07C 35/08 (20060101)

Expiration Date: 5/06/12018