Patent Number: 8,717,839

Title: Semiconductor device having plural penetration electrodes penetrating through semiconductor substrate and testing method thereof

Abstract: Disclosed herein is a device that includes first and second current paths, first and second latch circuits electrically connected to the first and second current paths, respectively, a driver circuit supplying first data to the first latch circuit, and supplying second data representing a logical value opposite to a logical value of the first data to the second latch circuit, a control circuit controlling the driver circuit to be alternately and repeatedly in a first period in which the driver circuit supplies the first data to the first latch circuit and does not supply the second data to the second latch circuit, and in a second period in which the driver circuit supplies the second data to the second latch circuit and does not supply the first data to the first latch circuit, and a monitor circuit.

Inventors: Yokou; Hideyuki (Tokyo, JP), Shigezane; Yasuyuki (Shizuoka, JP)

Assignee: Elpida Memory, Inc.

International Classification: G11C 29/00 (20060101); G11C 7/06 (20060101); G11C 5/06 (20060101); G11C 7/10 (20060101)

Expiration Date: 5/06/12018