Patent Number: 8,720,256

Title: Off-axis imaging for indentation instruments

Abstract: Modifications to the indenter probe tips and transducer, and proper selection of optics in an indentation system allow straight down or slightly angled optical viewing of the sample surface under the indentation tip by a microscope, by providing an optical path through the transducer from the sample surface under the tip to a microscope objective, thereby simplifying alignment of the tip to features on the sample.

Inventors: Bonin; Wayne Allen (North Oaks, MN)

Assignee:

International Classification: G01B 5/28 (20060101)

Expiration Date: 5/13/12018