Patent Number: 8,720,370

Title: Methods and apparatuses for roll-on coating

Abstract: Coating rollers accepting liquid media provide liquid chemicals to substrates for depositing a thin coating layer on the flat substrates, such as semiconductors or panels. The liquid media is cooled to a life-preserving temperature while shielded from the thermal energy heating the substrates to prevent degrading the liquid media. Physical barrier or temperature barrier can be established in vicinities of the rollers to further limit exposing the liquid media to high temperature.

Inventors: Rebstock; Lutz (Gaienhofen, DE)

Assignee: Dynamic Micro System Semiconductor Equipment GmbH

International Classification: B05C 11/00 (20060101); B05C 1/08 (20060101); B05C 3/00 (20060101)

Expiration Date: 5/13/12018