Patent Number: 8,721,295

Title: Vacuum pump self-diagnosis method, vacuum pump self-diagnosis system, and vacuum pump central monitoring system

Abstract: There are provided a vacuum pump self-diagnosis method, a vacuum pump self-diagnosis system, a vacuum pump central monitoring system capable of making self-diagnosis of a dry vacuum pump. A vacuum pump self-diagnosis method decides the occurrence of failure and generates an alarm when a predetermined alarm set value is exceeded by an integrated value or an average value of a current of a motor for rotating a rotor of said vacuum pump. In a vacuum pump self-diagnosis system for making self-diagnosis of a vacuum pump which comprises a casing and a rotor rotatably arranged in the casing for sucking and discharging a gas through rotations of the rotor, the rotor comprises a plurality of stages and a pressure sensor is provided between the rotor stages. A self-diagnosis unit is provided for calculating an integrated value or an average value of a current of a motor for rotating said rotor, and making self-diagnosis of the vacuum pump when the integrated value or average value exceeds a predetermined alarm set value. The self-diagnosis unit switches from one self-diagnosis calculation method to another or interrupts the self-diagnosis calculation based on a pressure value detected by said pressure sensor.

Inventors: Sugiura; Tetsuro (Tokyo, JP), Tanaka; Keiji (Tokyo, JP), Nakazawa; Toshiharu (Tokyo, JP), Kido; Koichi (Tokyo, JP), Yamazaki; Tomoyuki (Tokyo, JP)

Assignee: Ebara Corporation

International Classification: F04B 37/14 (20060101); F04B 49/00 (20060101)

Expiration Date: 5/13/12018