Patent Number: 8,791,423

Title: Aberration correction device and charged particle beam device employing same

Abstract: An aberration correction device includes, between a TEM objective lens and an STEM objective lens, a transfer lens group for transferring a coma-free surface of the TEM objective lens to a multipolar lens, a transfer lens group for transferring the coma-free surface of the TEM objective lens to a multipolar lens, and a transfer lens for correcting fifth-order spherical aberration of the STEM objective lens.

Inventors: Hirayama; Yoichi (Hitachinaka, JP)

Assignee: Hitachi High-Technologies Corporation

International Classification: H01J 37/153 (20060101); H01J 3/12 (20060101)

Expiration Date: 7/29/12018