Patent Number: 8,791,623

Title: Piezoelectric actuator and piezoelectric actuator array

Abstract: An aspect of a piezoelectric actuator according to the present invention comprises: a plate-like piezoelectric element (20); a sheet (30); and a movable body (50). The piezoelectric element is provided to the sheet (30) in such a manner that the upper surface of the plate-like piezoelectric element is parallel to the upper surface of the sheet. The sheet includes a movable body driving section (40) formed on one of the upper and the lower surfaces of the sheet. A movable body includes a contact section (51) contacting with the sheet at the movable body driving section. The actuator moves the movable body driving section in a direction parallel to the upper surface of the sheet by using expansion and contraction of the piezoelectric element in a direction parallel to the upper surface of the piezoelectric element to move the movable body.

Inventors: Tani; Makoto (Inazawa, JP)

Assignee: NGK Insulators, Ltd.

International Classification: H01L 41/08 (20060101)

Expiration Date: 7/29/12018