Patent Number: 8,794,427

Title: Multi-generational carrier platform

Abstract: A multi-generational carrier platform is configured to carry substrate carriers of different sizes depending on processing needs. Multiple carrier adaptors are provided on one side of a support plate, and substrate carriers can be distributed among the carrier adaptors to mount a maximum number of substrates under the constraint of non-overlap of the substrates and the substrate carriers. The multi-generational carrier platform can be configured to provide rotation to each substrate carrier mounted thereupon, and is compatible with chemical mechanical planarization processes that require rotation of substrates against an abrasive surface. The multi-generational carrier platform facilitates maximum utilization of a processing area provided by a tool configured to process substrates of different sizes.

Inventors: Lofaro; Michael F. (Hopewell Junction, NY)

Assignee: International Business Machines Corporation

International Classification: B65G 47/00 (20060101)

Expiration Date: 8/05/12018