Patent Number: 8,797,650

Title: Variable wavelength interference filter, optical module, and optical analysis device

Abstract: A wavelength-variable interference filter includes first and second electrodes provided at first and second substrates, respectively, the second substrate including a movable section, first and second electrode wires that extend from the first and second electrodes toward outer circumferential edges of the first and second substrates, respectively, a first opposite electrode wire disposed so as to be isolated from the second electrode, and a first conductive section that connects the first electrode wire with the first opposite electrode wire. The second electrode wire and the first opposite electrode wire extend passing through a center point of an imaginary circle of the movable section in respective directions and dividing the imaginary circle at regular angular intervals.

Inventors: Matsushita; Tomonori (Chino, JP), Matsuno; Yasushi (Matsumoto, JP)

Assignee: Seiko Epson Corporation

International Classification: G02B 27/00 (20060101)

Expiration Date: 8/05/12018