Patent Number: 8,814,620

Title: Crucible structure for plasma light source and manufacturing method

Abstract: Operation to produce an intermediate product for a crucible for a LUWPL is as follows: a) a body 2 is preheated and placed on a support, with its bore concentric with a tube 4 supported in a chuck and connected to a inflation means; b) the tube is heated with the chuck being rotated for evenness of heating; c) when the temperature of the tube is detected to be the softening point of the quartz of the tube, its rotation is stopped and it is advanced into a bore 3 in the body 2; d) advance is stopped when the distal, sealed end is detected to have reached a determined protrusion 18; e) simultaneously with the advance being stopped, inflation gas is admitted into the tube, to inflate it albeit it marginally, and bring its outer surface 5 into intimate contact with the surface 6 of the bore 4.

Inventors: Pothoven; Floyd R. (Lakewood, CA), Neate; Andrew Simon (Buckinghamshire, GB), Roscoe; Martyn (Leicestershire, GB), Preston; Barry (Leicestershire, GB)

Assignee: Ceravision Limited

International Classification: H01J 9/00 (20060101); H01J 9/20 (20060101)

Expiration Date: 8/26/12018