Patent Number: 8,814,970

Title: Trapping device that traps particles in vacuum atmosphere

Abstract: A trapping device that traps a particle in a vacuum atmosphere includes a plurality of grooves arrayed on a surface of the trapping device. Each of the plurality of grooves has a shape that is obtained by replacing a bottom part of a U-groove is replaced with a V-groove.

Inventors: Yonekawa; Masami (Tsukuba, JP)

Assignee: Canon Kabushiki Kaisha

International Classification: B01D 59/50 (20060101)

Expiration Date: 8/26/12018