Patent Number: 8,817,268

Title: Optical filter, optical filter module, and photometric analyzer

Abstract: An optical filter includes fixed substrate, a movable substrate opposed to the fixed substrate, a first reflection film provided on a surface of the fixed substrate facing the movable substrate, a second reflection film provided on the movable substrate and opposed to the first reflection film across a gap, a first electrode formed to cover the first reflection film and to extend beyond an outer circumference of the first reflection film, and a second electrode provided on a surface of the movable substrate facing the fixed substrate and opposed to a part of the first electrode, and the first electrode is formed of a light-transmissive material, and the first electrode and the second reflection film are electrically connected at the same potential.

Inventors: Sano; Akira (Shiojiri, JP), Matsuno; Yasushi (Matsumoto, JP)

Assignee: Seiko Epson Corporation

International Classification: G01J 3/45 (20060101); G02B 27/00 (20060101); G01B 11/02 (20060101)

Expiration Date: 8/26/12018