Patent Number: 8,819,926

Title: Methods and apparatuses of using metal needle arrays for specimen lift-out and circuit edit

Abstract: Embodiments of the present invention provide method and apparatus of restoring probes attached to the manipulator in a control environment (e.g. vacuum chamber of an focus ion beam) without a need to open the vacuum chamber. Another embodiment of the present invention teaches construction and application of various shapes of nanoforks from a nanoneedles array inside a FIB vacuum chamber. In another embodiment, the present invention teaches edition and correction of completed and oxide-coated circuit boards by re-nano-wiring using nanoneedles of a nanoneedles array (as nanowire supply), contained in the same controlled space. In this embodiment, individual nanoneedles in a nanoneedle array are manipulated by a manipulator and placed in such a way to make electrical contact between the desired points.

Inventors: Yazdanpanah; Mehdi M (Louisville, KY), Jalilian; Romaneh (Louisville, KY)


International Classification: H01R 43/00 (20060101)

Expiration Date: 9/02/12018