Patent Number: 8,821,642

Title: Apparatus for manufacturing flat-panel display

Abstract: Disclosed herein is a flat panel display (FPD) manufacturing apparatus for performing a desired process for a substrate positioned in a chamber after establishing a vacuum atmosphere in the chamber. The vacuum chamber is divided into a chamber body and an upper cover to ensure easy opening/closing operations of the upper cover.

Inventors: Lee; Young Jong (Sungnam-shi, KR), Choi; Jun Young (Seoul, KR), Jo; Saeng Hyun (Daejeon, KR), Ahn; Hyun Hwan (Sungnam-shi, KR), Son; Suk-Min (Daejeon, KR), Ahn; Sung Il (ChungCheongNam-do, KR)

Assignee: Advanced Display Process Engineering Co., Ltd.

International Classification: C23C 16/00 (20060101); C23F 1/00 (20060101)

Expiration Date: 9/02/12018