Patent Number: 8,823,249

Title: Irradiation device and irradiation method

Abstract: An irradiation device includes: a light source having an amalgam alloy member that is disposed on a part of the inner surface of a light source tube; and a chamber in which the light source is disposed. The chamber includes: a main chamber body; and a first gas inflow port and a first gas outflow port that are formed in the main chamber body. The first gas inflow port and the first gas outflow port are arranged so that the outer surface of the part of the light source tube where the amalgam alloy member is disposed is positioned in a flow path of a gas that flows in through the first gas inflow port and flows out through the first gas outflow port.

Inventors: Nakamura; Shinichi (Okaya, JP), Kinoshita; Seiji (Suwa, JP)

Assignee: Seiko Epson Corporation

International Classification: H01J 1/02 (20060101); H01J 7/24 (20060101); H01K 1/58 (20060101); H01J 61/52 (20060101)

Expiration Date: 9/02/12018