Patent Number: 8,823,950

Title: Shape measurement apparatus, and shape measurement method

Abstract: A shape measurement apparatus includes a distance measurement meter configured to emit and receive the beam in relation to the object; a beam deflection mechanism configured to deflect the beam from the distance measurement meter; and a control unit configured to determine at least one of a maximum beam deflection angle due to the beam deflection mechanism and the distance between a detected surface and the beam deflection mechanism when the beam is incident perpendicularly to the detected surface of the object, so that an error of a first measurement error that depends on a change in a spot diameter of the beam on the detected surface and a second measurement error that depends on an incidence angle on the detected surface of the beam is no more than a threshold value of a permitted error.

Inventors: Nakauchi; Akihiro (Utsunomiya, JP)

Assignee: Canon Kabushiki Kaisha

International Classification: G01B 11/24 (20060101)

Expiration Date: 9/02/12018