Patent Number: 8,869,362

Title: Method of forming an array of piezoelectric actuators on a membrane

Abstract: A method of forming an array of piezoelectric actuators on a membrane (18) which includes the steps of preparing a piezoelectric comb-like structure having an array of islands that are integrally connected by a continuous top portion and that form piezoelectric layers of the actuators, the islands having an electrode at a bottom side, attaching the comb-like structure with its bottom electrode to a surface of the membrane, removing the continuous top portion of the comb-like structure to thereby separate the actuators from one another, and forming top electrodes on the top surfaces of the piezoelectric layers of the actuators.

Inventors: Wijngaards; David D. L. (Tegelen, NL), Reinten; Hans (Velden, NL), Stolk; Hendrik J. (Bergen, NL), Westland; Alex N. (Baarlo, NL)

Assignee: Oce-Technology B.V.

International Classification: H01L 41/22 (20130101); H01L 41/083 (20060101)

Expiration Date: 2018-10-28 0:00:00