Patent Number: 8,871,066

Title: Sample receiving device for sample materials in ultra-high vacuum chambers

Abstract: The disclosure relates to a sample-receiving device for sample materials in ultra-high vacuum chambers, in particular for sputter coating installations.

Inventors: Dohrmann; Ralph (Vogelsen, DE)

Assignee: Deutsches Elektronen-Synchrotron DESY

International Classification: H01L 21/68 (20060101)

Expiration Date: 2018-10-28 0:00:00