Patent Number: 8,872,016

Title: Thermoelectric conversion structure and method of manufacturing same

Abstract: A thermoelectric conversion material in a wire structure or quasi-one-dimensional structure is fabricated simply and with good reproducibility. In one mode of the present invention, a thermoelectric conversion structure 100 is provided, having a SrTiO.sub.3 substrate 10 having a (210) plane substrate surface and having a concave-convex structure including (100) plane terrace portions 12, 14 and step portions 16 extending along the in-plane [001] axis of the substrate surface, and a thermoelectric conversion material 22 formed on the surface of at least a portion of the concave-convex structure.

Inventors: Ogimoto; Yasushi (Higashiyamato, JP)

Assignee: Fuji Electric Co., Ltd.

International Classification: H01L 35/04 (20060101); H01L 35/34 (20060101)

Expiration Date: 2018-10-28 0:00:00