Patent Number: 8,877,657

Title: Process for producing semiconductive layers

Abstract: The present invention relates to a process for producing a layer comprising at least one semiconductive metal oxide on a substrate, comprising at least the steps of: (A) preparing a solution comprising at least one precursor compound of the at least one metal oxide selected from the group consisting of carboxylates of mono-, di- or polycarboxylic acids having at least three carbon atoms, or derivatives of mono-, di- or polycarboxylic acids, alkoxides, hydroxides, semicarbazides, carbamates, hydroxamates, isocyanates, amidines, amidrazones, urea derivatives, hydroxylamines, oximes, urethanes, ammonia, amines, phosphines, ammonium compounds, azides of the corresponding metal and mixtures thereof, in at least one solvent, (B) applying the solution from step (A) to the substrate and (C) thermally treating the substrate from step (B) at a temperature of 20 to 200.degree. C., in order to convert the at least one precursor compound to at least one semiconductive metal oxide, where, if electrically neutral [(OH).sub.x(NH.sub.3).sub.yZn].sub.z where x, y and z are each independently 0.01 to 10 is used as the precursor compound in step (A), it is obtained by reacting zinc oxide or zinc hydroxide with ammonia, to a substrate which has been coated with at least one semiconductive metal oxide and is obtainable by this process, to the use of this substrate in electronic components, and to a process for preparing electrically neutral [(OH).sub.x(NH.sub.3).sub.yZn].sub.z where x, y and z are each independently 0.01 to 10, by reacting zinc oxide and/or zinc hydroxide with ammonia.

Inventors: Karpov; Andrey (Mannheim, DE), Fleischhaker; Friederike (Niedernhausen, DE), Domke; Imme (Mannheim, DE), Kastler; Marcel (Mainz, DE), Wloka; Veronika (Mannheim, DE), Weber; Lothar (Bielefeld, DE)

Assignee: BASF SE

International Classification: H01L 21/31 (20060101)

Expiration Date: 2019-11-04 0:00:00