Patent Number: 8,878,141

Title: Drawing apparatus, and method of manufacturing article

Abstract: The present invention provides a drawing apparatus which performs drawing on a substrate with a plurality of charged particle beams, the apparatus including a stage configured to hold the substrate and to be moved, a charged particle optical system including a deflector configured to deflect the plurality of charged particle beams, a detector configured to detect a charged particle arrived thereat by causing a charged particle beam to impinge on a mark including a plurality of mark elements formed on one of the substrate and the stage, and a processor configured to perform a process of obtaining a position of the mark.

Inventors: Yamaguchi; Wataru (Utsunomiya, JP), Matsumoto; Takahiro (Utsunomiya, JP)

Assignee: Canon Kabushiki Kaisha

International Classification: G21K 5/04 (20060101)

Expiration Date: 2019-11-04 0:00:00