Patent Number: 8,879,044

Title: Lithographic apparatus, and motor cooling device

Abstract: A lithographic device includes a cooling device for removing heat from a motor. The cooling device has a cooling element provided in thermal contact with at least part of the motor. The cooling device further has a cooling duct assembly with a supply duct to supply a cooling fluid to the cooling element, and a discharge duct to discharge the cooling fluid from the cooling element. A pump causes the cooling fluid to flow through at least part of the cooling duct assembly. A flow control device controls a flow rate of the cooling fluid through at least part of the cooling duct assembly, to maintain a predetermined average temperature of the cooling fluid in the cooling element.

Inventors: Auer; Frank (Valkenswaard, NL)

Assignee: ASML Netherlands B.V.

International Classification: G03B 27/52 (20060101)

Expiration Date: 2019-11-04 0:00:00