Patent Number: 9,431,205

Title: Fold over emitter and collector field emission transistor

Abstract: A field emission transistor includes a gate, a fold over emitter, and fold over collector. The emitter and the collector are separated from the gate by a void and are separated from a gate contact by gate contact dielectric. The void may be a vacuum, ambient air, or a gas. Respective ends of the emitter and the collector are separated by a gap. Electrons are drawn across gap from the emitter to the collector by an electrostatic field created when a voltage is applied to the gate. The emitter and collector include a first conductive portion substantially parallel with gate and a second conductive portion substantially perpendicular with gate. The second conductive portion may be formed by bending a segment of the first conductive portion. The second conductive portion is folded inward from the first conductive portion towards the gate. Respective second conductive portions are generally aligned.

Inventors: Briggs; Benjamin D. (Waterford, NY), Clevenger; Lawrence A. (LaGrangeville, NY), Rizzolo; Michael (Albany, NY)

Assignee: International Business Machines Corporation

International Classification: H01L 21/00 (20060101); H01J 9/02 (20060101); H01J 21/10 (20060101); H01J 19/24 (20060101)

Expiration Date: 2020-08-30 0:00:00