Patent Number: 9,431,300

Title: MOL architecture enabling ultra-regular cross couple

Abstract: A method of forming an ultra-regular layout with unidirectional M1 metal line and the resulting device are disclosed. Embodiments include forming first and second vertical gate lines, spaced from and parallel to each other; forming a M1 metal line parallel to and between the first and second gate lines; forming first, second, and third M0 metal segments perpendicular to the M1 metal line; connecting the first M0 metal segment to the M1 metal line and the second gate line; connecting the second M0 metal segment to the first gate line and the second gate line; connecting the third M0 metal segment to the first gate line and the M1 metal line; forming a first gate cut on the first gate line between the second and third M0 metal segments; and forming a second gate cut on the second gate line between the first and second M0 segments.

Inventors: Zeng; Jia (Sunnyvale, CA), Kye; Jongwook (Pleasanton, CA), Levinson; Harry J. (Saratoga, CA)

Assignee: GLOBALFOUNDRIES INC.

International Classification: H01L 21/82 (20060101); H01L 23/522 (20060101); H01L 23/528 (20060101); H01L 21/8234 (20060101); H01L 29/66 (20060101); H01L 27/088 (20060101); H01L 29/45 (20060101); H01L 21/00 (20060101)

Expiration Date: 2020-08-30 0:00:00